WebbThe industry proven CLUSTERLINE® 300 is a flexible cluster platform allowing easy tool configuration with single process modules or unique batch sputter module technology. … WebbInline sputtering facility with five coating modules and two lock chambers; One lock chamber with clean-room access, incl. professional substrate cleaning system; Planar …

Helmholtz Centre Berlin relies on Leybold Optics technology

WebbUsing the Linear Sputter PVD system from Angstrom Engineering allows you to process thin films of semiconductors or metals on large area panels in display, photovoltaic, and … WebbThe newly developed GENERIS PVD system is a horizontal inline sputter tool designed for special requirements in photovoltaic high efficiency cell production. A Heterojunction cell performance of 22.3% was achieved … spurreys

Press Release, Leybold, Helmholtz-PVcomB, Sep 6th 2011

Webb30 sep. 2013 · Features of In-Line Sputtering Systems. An “In-Line” PVD Sputtering System is one in which substrates pass linearly beneath one or more Sputter cathodes to acquire their Thin Film coating. Normally the substrates are loaded onto a carrier or pallet in order to facilitate this motion, and some smaller systems handle just one pallet per … WebbThe KDF 744i Series is a large area, four-target, batch sputtering system, designed for processing high-density interconnect, 200mm semiconductor wafers, OLED and flat panel displays. The tool was developed to meet increasing customer demand for higher throughput with larger substrates. Vertical side sputtering system; 19” x 19” pallet size WebbWith the GENERIS PVD sputtering system, contact layers can be deposited on the front and rear of the Si wafers without the need to turn the wafers between coating … spurred up meaning